JPH01102640U - - Google Patents
Info
- Publication number
- JPH01102640U JPH01102640U JP20123587U JP20123587U JPH01102640U JP H01102640 U JPH01102640 U JP H01102640U JP 20123587 U JP20123587 U JP 20123587U JP 20123587 U JP20123587 U JP 20123587U JP H01102640 U JPH01102640 U JP H01102640U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- clean room
- exhaust chamber
- air conditioner
- ceiling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001143 conditioned effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000009429 electrical wiring Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20123587U JPH01102640U (en]) | 1987-12-28 | 1987-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20123587U JPH01102640U (en]) | 1987-12-28 | 1987-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01102640U true JPH01102640U (en]) | 1989-07-11 |
Family
ID=31491605
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20123587U Pending JPH01102640U (en]) | 1987-12-28 | 1987-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01102640U (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6176836A (ja) * | 1984-09-19 | 1986-04-19 | Hitachi Ltd | 空気調和室 |
-
1987
- 1987-12-28 JP JP20123587U patent/JPH01102640U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6176836A (ja) * | 1984-09-19 | 1986-04-19 | Hitachi Ltd | 空気調和室 |